Hind High Vacuum Co. Private Limited, Bangalore

HINDHIVAC has developed an advanced coating system (Box Type High Vacuum Coating Unit Model BC-300, BC 600) that meets all the requirements for modern thin film technology. The new Box Coating Unit is capable of producing clean ultimate vacuum up to 10 m.bar. These Box Coater units are specially developed to meet the growing demands of the optical/semiconductor coating and other electronic device manufacturers. The whole unit is designed taking into consideration of all the aspects of the overall performance for producing repeatable and reproducible products.

The pumping system is designed for faster pump down time of the chamber with cleanest possible vacuum conditions. The whole chamber gadgetry is designed to produce components with excellent uniformity fitted with optional rotary/planetary drives, ion bombardment facility, LT evaporation facility.

The Box Coater has wide range of applications: Protective coating against solar radiation Interference Filters, Cold light mirrors Laser mirrors Protective hard glass layers on plastics Reflection & Anti-reflection layers Anti-corrosive layers Semi-conductor layers ,Electrically conductive & Transparent layers, Contact layers.

The basic Box Coater unit consists of high vacuum chamber gadgetries such as rotary drive, ion cleaning system etc. and vacuum pumping system consisting of rotary vacuum pump, fore line trap, Right angle isolation valve, air admittance valve etc., Microprocessor based digital pirani gauge & penning gauge. Box Coater System can be offered with diffusion pump or imported Turbo/cryopump. The cubical vacuum chamber in this Box Coater is made out of stainless steel and the inner walls polished to achieve low degassing rates to reach better ultimate vacuum. The base plate is provided with number of ports.

Optional Accessories (BC-300): 3 KW Electron Beam Gun 270 bent beam with single source/4-source, 3 KW power supply. Digital Thickness Monitor.

Optional Accessories (BC-600): 8 KW Electron Beam Gun 270 bent beam with 4 source or Single source capacity, 6 KW power supply, Planetary drive, Digital Thickness Monitor.

HINDHIVAC Laser Ablation unit is specially designed for evaporation of special material under high vacuum condition with the help of laser beam Source, Since the laser beam is the cleanest source for heating the material, the thin film produced will have high purity compared to thin films produced by conventional evaporation methods.

The Laser Ablation unit and the gadgetries inside chamber are carefully designed using quartz window for laser beam entry at 45° angle to the target. Target holder is made to rotate on its axis for uniform erosion of the material. Opposite to the evaporation target, substrate holder with heating facility is provided for heating the substrate to 900°C. The chamber with gadgetries is evacuated to a vacuum of 10-6 m.bar range using HINDHIVAC high-speed vacuum pumping system.

The equipment is complete with the chamber gadgetries high vacuum system control instruments with measuring gauges. Required safety interlocks is built in the system to protect system and the operator.

Vacuum Coater 12A4-D is a versatile laboratory model coating unit for thin film application with facilities for evaporation, glow discharge cleaning etc. as standard. Vacuum Coater 12A4-D comes with optional accessories like Substrate Heating, Rotary Drive, Flash Evaporation, EB Gun evaporation etc. to meet the specific requirements of the customers.

12A4-D Vacuum Coater is an ideal unit for thin film coatings in Research, Educational institutions, semiconductor, optics and material development institutions. The Vacuum coating unit & chamber categories are manufactured using high vacuum compatible materials.