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Vacuum Techniques Private Limited

Bengaluru, Karnataka

Year of Establishment: 1989
IndiaMART Member Since: 2009
Products [47]
Phone: +(91)-(80)-28392746

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Products & Services

Coating Systems (3)

Custom Built Systems (10)

Measuring Instruments (5)

Vacuum Components (9)

Vacuum Furnaces (4)

Valves (4)

Other Products (12)

Coating Systems



Lab Type Coating Unit

Lab Type Coating Unit

Product Code : vt-LTCU

Description

Vacuum Techniques Coating unit is designed for laboratory use for general purpose evaporation specially suitable for R&D. it is a user friendly unit for electronics, electrical, optical industry. Also larger models are available for regular production.

The choice of accessories covers the following : Resistance Heating Electron Beam Evaporation D.C. Sputtering Glow Discharging, Cleaning Radiant Heater of Substrates etc. The Coating Unit covers application in Micro Electronic, Optics, Metallurgy, Electron Microscopy etc. The coating unit features a specially designed Diffusion Pump and fitted with Liquid Nitrogen Trap ensuring clean vacuum and rapid pump down cycle. It essentially consists of : High Vacuum Pumping System : this consists of diffusion pump suitable for general pumping of gases in any chamber. The basic system is capable of giving a vacuum of order 10-6mbar. The system contains rotary pump, diffusion pump along with vacuum valves etc. It also consists of a combined analog or digital Pirani penning gauges which moniters vacuum of backing, roughing and high vacuum. Metal Belljar with water cooling facility, the belljar is made out of SS304 and is leak tested by MSLD to leak rate better than 1x10-8 std cc./sec. The Belljar is compatible to high vacuum . Base plate is fitted with LT and of HT electrodes. It is made of SS304 material and also houses. The crystal holder feedthroughs, ion cleaning electrodes etc., HT and LT power supplies with variac Provision for introducing digital thickness monitor For larger unit, belljar lifting facility provided. Safety Devices : Water flow switches to put off the D.P heater under water supply failure. Thermostat switch protects Diffusion Pump from excessive heating. DP is interlocked with Rotary Pump. Electrical over load switch.


 
 

Plasma Nitriding System

Plasma Nitriding System

Product Code : vt-PN

Description

The Plasma Nitriding System essentially consist of chamber made of SS 304 material with required No. of ports, a mounting stand to mount the chamber, hydraulic lifting mechanism to lift the whole chamber from base plate assembly, a pumping system consisting of Roots Blower and a suitable Rotary Pump to achieve a ultimate vacuum of 10-3 mbar.

Vacuum measuring gauges, Gas Handling System for mixing Nitrogen and Hydrogen consisting of a Mass Flow Controller and close loop controlled conductance solenoid valve. Suitable pulsed power supply for nitriding.

 
 

RF/DC Sputtering System

RF/DC Sputtering System
RF/DC Sputtering System

Product Code : vt-RF/DC

Description

RF/DC Sputtering System

The RF/ DC Magnetron Sputtering System consists of : High Vacuum Pumping module with Turbo Pump. High vacuum chamber with top and bottom Demountable flanges used for sputtering and glow discharge. Chamber is bakeable to 1500 C and compatible to vacuum in the range of 10-7 mb. Hydraulic/Motor-screw rod arrangement for up-down movement of top cover Magnetron cathode : All the sputtering cathodes are mounted in the sputtering chamber for sequential operation and the cathodes are suitably partitioned so that cross contamination of the target is prevented. Horizontal shutter for each target is provided with facility to control from the computer. Stainless steel substrate holder in the sputtering chamber to mount the substrates. Substrate Heater with temperature measurement and control through PID and Thyrister controller upto 800 ± 10 C RF power supply with auto tuner for RF magnetron sputtering and facility for substrate cleaning and DC power supply for DC sputtering Quartz Crystal Thickness Monitor with water cooled Crystal Feedthrough and control console to house all the power supplies, drives, controls and indications. Adjustable distance between target and substrate. 4 Channel mass flow controller with digital display unit of MKS Instruments. Same RF Power supply can be used for etching / cleaning of the substrate with a external switch for selection of polarity.


 
 

 

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